发明名称 Method for manufacturing semiconductor device
摘要 In the case of forming fine wires and the like by a droplet discharging apparatus to manufacture electric circuits, discharging controls including controls of a discharging position, a discharging timing, and the like are required to have very high accuracy. After forming design diagram data of an electric circuit by a CAD tool, the design diagram data is converted into first raster data, which is then converted into second raster data. The first raster data is a square grid regarding a dot pitch Xdp in a horizontal direction and a dot pitch Ydp in a perpendicular direction as one unit. The second raster data is a rectangular grid regarding the dot pitch Xdp in the horizontal direction and a dot pitch Ydp/V (V>1) as one unit. It is to be noted that arbitrary discharging number is the same before and after the conversion from the first raster data to the second raster data.
申请公布号 KR101218564(B1) 申请公布日期 2013.01.18
申请号 KR20060092302 申请日期 2006.09.22
申请人 发明人
分类号 H01L29/786 主分类号 H01L29/786
代理机构 代理人
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