| 摘要 |
An array substrate for an LCD(Liquid Crystal Display) integrated with a driving circuit and a manufacturing method thereof are provided to manufacture the array substrate by performing a mask process five times, thereby reducing manufacturing time and costs and improving productivity and yields by simplifying processes. On a substrate, first to fourth amorphous silicon(a-Si) patterns, transparent conductive patterns, a pixel electrode(106) made from the same material and on the same layer as the transparent conductive pattern, and a first storage electrode(116) connected to the pixel electrode are formed. By crystallizing the first to third a-Si patterns, first to third semiconductor layers(114) of poly silicon are formed. A gate insulating layer is formed on the front of the first to third semiconductor layers, the first storage electrode and the pixel electrode. On the gate insulating layer, first to third gate electrodes(125) are respectively formed in the centers of the first to third semiconductor layers, and a second storage(127) electrode is formed to be corresponded to the first storage electrode. By performing n+ doping of a first dose, n- doping of a second dose and p+ doping of a third dose, an active layer(114a) which is not doped to the first and second semiconductor layers, an n+ doped n-type ohmic contact layer(114b), and an n- doped LDD(Light Doped Drain) layer(114c) are formed. An active layer which is not doped to the third semiconductor layer and a p+ doped p-type ohmic contact layer are formed. First to third source and drain electrodes(150a,150b) respectively contacted with the ohmic contact layer of the first to third semiconductor layers and spaced from each other are formed. A third storage electrode(153) connected to the first drain electrode and corresponding to the second storage electrode is formed. |
