| 发明名称 |
DEVICE AND METHOD OF INSPECTION |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique for contactlessly inspecting a photoexcited carrier generation area of a photo device formed on a substrate. <P>SOLUTION: An inspection device 100 inspects a solar cell panel 90 in which photo devices are formed. The inspection device 100 includes a radiation unit 12 for radiating pulse light LP11 to the solar cell panel 90 through a light receiving face 91s thereof, and a detection unit 13 (detector 132) for detecting an electric field intensity of a terahertz wave pulse TL1 generated in response to the radiation of the pulse light LP11. <P>COPYRIGHT: (C)2013,JPO&INPIT |
| 申请公布号 |
JP2013019861(A) |
申请公布日期 |
2013.01.31 |
| 申请号 |
JP20110155665 |
申请日期 |
2011.07.14 |
| 申请人 |
DAINIPPON SCREEN MFG CO LTD;OSAKA UNIV |
发明人 |
NAKANISHI HIDETOSHI;TOUCHI MASAKICHI |
| 分类号 |
G01M11/00;H01L21/66 |
主分类号 |
G01M11/00 |
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