| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a solar cell including a light absorption layer composed of a chalcopyrite compound free from crystal distortion. <P>SOLUTION: Following to the selenization, nitrogen gas (N<SB POS="POST">2</SB>) is introduced by reducing the pressure in a thermal treatment apparatus, and substituted by H<SB POS="POST">2</SB>Se gas. At a moment in time when the temperature in a furnace reaches 200°C, it is reheated for tempering. The temperature reaches 390°C in the reheating. Subsequently, it is cooled gradually, and a light absorption layer composed of a chalcopyrite compound, from which crystal distortion resulting from internal stress is removed, is obtained. <P>COPYRIGHT: (C)2013,JPO&INPIT |
