| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide: a new cyclodextrin derivative into which a group derived from an adamantane compound having high heat resistance is introduced; and a production method thereof; and a resist material that can form fine patterns stably in high accuracy. <P>SOLUTION: This cyclodextrin derivative comprises 6 to 8 glucose units, in which at least one hydroxy group of a glucose unit is ether-linked with a group represented by formula (a), in formula, R<SP POS="POST">4</SP>represents an alkyl group. <P>COPYRIGHT: (C)2013,JPO&INPIT |
