PIEZOELECTRIC THIN FILM RESONATOR AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric thin film resonator and a method of manufacture thereof which implement an improved temperature characteristic of frequency, and implement an appreciable resonance characteristic by suppressing turbulence of the orientation of a piezoelectric film.

SOLUTION: The piezoelectric thin film resonator includes: a lower electrode 12 disposed on a substrate 10; a first piezoelectric film 14 and a second piezoelectric film 18 disposed in two layers on the lower electrode 12; an upper electrode 20 disposed on the second piezoelectric film 18 and provided with a region opposite to the lower electrode 12 with the first piezoelectric film 14 and the second piezoelectric film 18 in between; and an insulating film 16 disposed between the two layers of the first piezoelectric film 14 and second piezoelectric film 18 in a region where the lower electrode 12 and the upper electrode 20 are opposite to each other. The insulating film 16 is flatter on an upper surface than on a lower surface.

COPYRIGHT: (C)2013,JPO&INPIT