发明名称
摘要 A polishing brush adapted for a method for polishing a disk-like glass substrate having a circular hole at its center, where the polishing is made by rotating the brush while it is made to be in contact with an end surface on the inner circumference side of the glass substrate and while polishing liquid is supplied to the portion of the end surface. The polishing brush (20) has bristles (22) fitted projecting in the direction substantially perpendicular to the axis (21) of the brush (20). Those portions of the brush that have two different diameters D1 and D2 are alternately arranged in the axial direction, and the bristles of the portions having the small diameter D2 have higher hardness than those of the portions having the large diameter D1. For this purpose, the bristles of the portions with the small diameter D2 of the polishing brush (20) are stiffened with resin.
申请公布号 JP5154777(B2) 申请公布日期 2013.02.27
申请号 JP20060253904 申请日期 2006.09.20
申请人 发明人
分类号 B24D7/18;B24B5/06;B24B5/313;B24B9/08;B24B29/00;B24D3/00;B24D3/28;G11B5/84 主分类号 B24D7/18
代理机构 代理人
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