| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator equipped with a piezoelectric layer of strainless crystal and exhibiting good displacement, and to provide a liquid ejection head equipped with an actuator as a drive source for ejecting a liquid drop, and a liquid ejector. <P>SOLUTION: The actuator is provided, on the upper side of an elastic film 50 formed of silicon dioxide SiO<SB>2</SB>on a silicon Si single crystal substrate, with a piezoelectric element 300 including a lower electrode 60, a buffer layer 65 of a conductive material having a plane orientation (100) provided on the lower electrode 60, a piezoelectric layer 70 of lead zirconate titanate (PZT) grown epitaxially on the buffer layer 65 and having a plane direction (100), and an upper electrode 80 provided on the piezoelectric layer 70, wherein the piezoelectric layer 70 has a stepwise layer 72 consisting of a plurality of layers provided on the boundary to the buffer layer 65 and having a composition progressively varied in each layer, and a piezoelectric layer body 76 laminated on the stepwise layer 72. <P>COPYRIGHT: (C)2007,JPO&INPIT |
