| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid supply device and a method that can continuously supply liquid regardless of a liquid level while stably preventing the generation of cavitation. <P>SOLUTION: The liquid supply device includes: a liquid raw material tank 1 in which the liquid is stored; a transfer pump 4 that transfers the liquid from the tank; and a pressurization gas generation device 19 that generates pressurized gas using a different material from the liquid and supplies the pressurized gas to the liquid raw material tank 1. A self-suction pump may be used as the transfer pump 4, and the liquid raw material tank 1 may be disposed at a lower position than the transfer pump 4. <P>COPYRIGHT: (C)2013,JPO&INPIT |
