LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD,申请号KR20127024057-传众专利搜索

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发明名称	LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
摘要
申请公布号	KR20130028065(A)	申请公布日期	2013.03.18
申请号	KR20127024057	申请日期	2011.02.18
申请人	ASML NETHERLANDS B.V.	发明人	ONVLEE JOHANNES;DE JAGER PIETER;VAN ZWET ERWIN
分类号	G03F7/20;G03F9/00	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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