| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect flaws on the surface of an inspected object even when the surface condition of a harmless pattern is unstable while preventing erroneous detection of the harmless pattern. <P>SOLUTION: A surface flaw inspection device 1 includes an imaging unit 4 that receives reflectance of illumination light applied to an inspected object 2 and takes a surface image of the inspected object 2, a polarization angle adjustment unit 12 that changes relative angles of a polarizer 5 and an analyzer 6 for defining optical condition of the imaging unit 4, an image monitor 10 that evaluates the surface image of the inspected object 2 taken by the imaging unit 4, and a polarization angle correction input unit 11 that inputs angle of the analyzer 6 according to evaluation by the image monitor 10. <P>COPYRIGHT: (C)2013,JPO&INPIT |
