| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve accuracy of a drawing position in a circumferential direction when a fine pattern for a disk-like magnetic recording medium is drawn by electron beam scanning while rotating a rotary stage. <P>SOLUTION: In principle, pattern drawing based on a drawing data signal group of each predetermined area in a circumferential direction of each radial position is started after a lapse (t<SB POS="POST">n</SB>+Δt<SB POS="POST">n</SB>) of a predetermined time period Δt<SB POS="POST">n</SB>from a predetermined encoder pulse E<SB POS="POST">n</SB>generated before the predetermined area is positioned at an electron beam radiation position. When rotation speed variations generates an encoder pulse E<SB POS="POST">n+1</SB>that should be generated after a lapse of the predetermined time period Δt<SB POS="POST">n</SB>, before a lapse of the predetermined time period Δt<SB POS="POST">n</SB>from the encoder pulse E<SB POS="POST">n</SB>that is a reference for starting drawing in the predetermined area, pattern drawing in the area is started at its occurrence time t'<SB POS="POST">n+1</SB>. <P>COPYRIGHT: (C)2013,JPO&INPIT |
