| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small and low profile fluid control device capable of obtaining a higher pressure without decreasing a flow rate, compared to conventional rates. <P>SOLUTION: A piezoelectric pump 101 comprises a vibrating plate unit 160, a flexible plate 151, and a base plate 191. The vibrating plate unit 160 comprises a vibrating plate 141, a frame plate 161, and a link portion 162. The frame plate 161 is provided at the periphery of the vibrating plate 141, and the vibrating plate 141 is flexibly and elastically supported at three points against the frame plate 161 by the three link portions 162. The vibrating plate 141 includes a protrusion 143 protruding from a region of the vibrating plate 141 facing the movable portion 154 of the flexible plate 151 toward the direction of the movable portion 154. The flexible plate 151 is joined to the frame plate 161 so as to face the vibrating plate 141. The flexible plate 151 includes the movable portion 154 and a fixing portion 155. <P>COPYRIGHT: (C)2013,JPO&INPIT |
