| 摘要 |
A method for manufacturing an LCD(Liquid Crystal Display) is provided to perform a coating and baking process and an ashing processing using atmospheric plasma in the same chamber, thereby preventing particles from entering chambers and reducing a substrate conveying time when a substrate is conveyed from a chamber to another chamber. Photoresist is coated on a substrate in a first chamber by a coating process apparatus(600). Heat is applied to the photoresist coated on the substrate through a baking coating apparatus(700) to harden the photoresist in the first chamber. The hardened photoresist is ashed through an ashing apparatus(800) by using atmospheric plasma in the first chamber. |
