| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film inspection system or the like that extracts a defect in a film with optical anisotropy and accurately determines the kind of the defect. <P>SOLUTION: In the film inspection system 1, an optical compensation film 10 irradiated with illumination light via a polarizer 51a is imaged by a line sensor 3a via a polarizer 31a, and the film irradiated with the illumination light via a polarizer 51b is imaged by a line sensor 3b via a polarizer 31b. The polarization directions of the polarizer 31a and the polarizer 51a, and those of the polarizer 31b and the polarizer 51b are substantially orthogonal to each other. The polarization direction of the polarizer 31a and the alignment direction of the optical compensation film 10 form an angle of substantially 45 degrees. The polarization direction of the polarizer 31b and the alignment direction of the optical compensation film 10 form an angle shifted by a predetermined angle from 90 degrees. The image processing device 7 detects a defect candidate and determines the kind of the defect on the basis of the image data 20a, 20b obtained by the line sensors 3a, 3b capturing the optical compensation film 10. <P>COPYRIGHT: (C)2013,JPO&INPIT |
