| 摘要 |
PURPOSE: A zinc-oxide transparent conductivity manufacturing method and a zinc-oxide transparency conductivity oxide film are provided to evaporate metal nano particle on a zinc oxide thin film through a thermal or electrochemical evaporate method. CONSTITUTION: A Ga dopant is doped on a zinc oxide film(120). A produced zinc-oxide transparent conductive oxide film(100) is formed on a substrate(110). A metal nano particle(130) is formed in a nano point shape on the zinc-oxide transparent conductive oxide film. The metal nano particle is formed in a metal nano particle layer(130a). The dopant is Ga. The metal nano particle is Ag. |
