发明名称 DETECTOR FOR USE IN A CHARGED PARTICLE APPARATUS
摘要 A detector with a Silicon Diode and an amplifier, and a feedback element in the form of, for example, a resistor or a diode, switchably connected to the output of the amplifier. When the feedback element is selected via a switch, the detector operates in a Current Measurement Mode for determining electron current, and when the element is not selected the detector operates in its well-known Pulse Height Measurement Mode for determining the energy of X-ray quanta.
申请公布号 US2013099114(A1) 申请公布日期 2013.04.25
申请号 US201213544776 申请日期 2012.07.09
申请人 KOOIJMAN CORNELIS SANDER;VAN VEEN GERARDUS NICOLAAS ANNE;FEI COMPANY 发明人 KOOIJMAN CORNELIS SANDER;VAN VEEN GERARDUS NICOLAAS ANNE
分类号 G01T1/24;H01J37/26 主分类号 G01T1/24
代理机构 代理人
主权项
地址