| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum pump integrated with an electric power supply in which its pump separation history can be easily detected to readily enable the pump to be managed in a safe condition. <P>SOLUTION: There is provided the vacuum pump integrated with an electric power supply in which a pump unit 20 and a control unit 30 are separably fixed. The pump unit 20 includes an RFIC tag 44 storing separation decision data. The control unit 30 comprises a reader 35 for reading the data stored in the RFIC tag 44 and a storage unit 35a for retaining the data of a separation flag ON condition as separation information when the data have been unable to be read by the reader 35. When the data of the separation flag ON have been retained in the storage unit 35a at the time of power-on, a principal control unit 31 inhibits the start of the pump unit 20. <P>COPYRIGHT: (C)2013,JPO&INPIT |
