OPTICAL WAVEGUIDE DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide device having excellent optical characteristics by suppressing oxidation of a metal film constituting a metal-loaded polarizer and etching due to a post step in a manufacturing process, and to provide a method for manufacturing the optical waveguide device.

SOLUTION: This optical waveguide device has: a substrate 1 having an electrooptical effect; an optical waveguide 2 formed on the substrate; and a metal-loaded polarizer 3 formed so as to cover at least a part of the optical waveguide. The optical waveguide device is characterized in that a protecting film 33 is formed in the metal-loaded polarizer such that the protecting film covers the whole exposed portion of a metal film 30.

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