发明名称 |
System and method for monitoring in-situ processing of specimens using coherent anti-Stokes Raman scattering (CARS) microscopy |
摘要 |
System and method are disclosed for in-situ monitoring of a specimen while undergoing a defined process. The system includes a processing system adapted to perform the defined process on the specimen, and a coherent anti-Stokes Raman scattering (CARS) microscopy system adapted to in-situ monitor the specimen. In another aspect, the CARS microscopy system is adapted to in-situ monitor the specimen simultaneous with the defined process being performed on the specimen by the processing system. In still another aspect, the CARS microscopy system is adapted to perform a measurement of the specimen while the defined process being performed on the specimen is paused or temporarily halted. |
申请公布号 |
US8441630(B2) |
申请公布日期 |
2013.05.14 |
申请号 |
US20100778074 |
申请日期 |
2010.05.11 |
申请人 |
BALDACCHINI TOMMASO;ZADOYAN RUBEN;NEWPORT CORPORATION |
发明人 |
BALDACCHINI TOMMASO;ZADOYAN RUBEN |
分类号 |
G01J3/44 |
主分类号 |
G01J3/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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