| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique of an interference objective lens capable of minutely moving an interferometer part without excessively complicating the structure. <P>SOLUTION: An interference objective lens 10 includes: a fixed housing 11 that stores a plurality of lenses in the interior thereof and is attached to an optical device body; a sliding frame 15 that retains at least a part of an interferometer part 13 and slides with respect to the fixed housing 11; and an adjusting ring 14 including a female screw 14a with a first pitch that is threadedly engaged with the fixed housing 11, and a female screw with a second pitch that is different from the first pitch and threadedly engaged with the sliding frame 15. The fixed housing 11, the adjusting ring 14 and the sliding frame 15 are functioned as a differential screw mechanism so as to minutely move the interferometer part 13 in the direction of an optical axis AX. <P>COPYRIGHT: (C)2013,JPO&INPIT |
