| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration noise correction device and method for an optical inspection system, capable of preventing erroneous detection due to vibration noise. <P>SOLUTION: The vibration noise correction device for an optical inspection system includes: a first illumination unit for irradiating an object to be inspected with light having constant lightness; a second illumination unit installed so as to irradiate the object to be inspected with light having the same lightness as the first illumination unit when vibration noise occurs in the object to be inspected; an illumination control unit for alternately turning on/off the first illumination unit and the second illumination unit at a constant speed; an imaging unit for acquiring a first image and a second image of the object to be inspected illuminated by the first illumination unit and the second illumination unit; and a video processing unit for replacing the first image with the second image when the vibration noise occurs in the object to be inspected. <P>COPYRIGHT: (C)2013,JPO&INPIT |
