| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique for forming a multicrystal silicon film having a PN junction easily in a short time and to provide a solar cell panel which can be manufactured at low cost according to the technique. <P>SOLUTION: A manufacturing method of a multicrystal solar cell panel includes a step for forming a layer of silicon powder 2 by coating the surface of a substrate 3 with P-type silicon powder 2 containing boron of which the particle size is 10 μm or less, a step for forming a P-type multicrystal silicon film 4 by melting and then recrystallizing the layer of silicon powder 2 through plasma scanning on the surface, a step for disposing in a plasma reaction chamber the substrate 3 on which the P-type multicrystal silicon film 4 is formed, a step for forming a PN junction by introducing phosphorous or arsenic containing gas into the plasma reaction chamber for plasma gasification and making a top layer of the P-type multicrystal silicon film 4 into N-type 4b, and a heating step for activating the top layer of the P-type multicrystal silicon film 4 made into N-type 4b. <P>COPYRIGHT: (C)2013,JPO&INPIT |
