| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cassette for substrate that has superior durability in processing such as masking, etching, cleaning, etc., of a glass substrate etc., has small strain and deformation, especially, in molding and thereby has superior size precision, can have a rib-like shelf piece, projecting outside the cassette, made compact or removed, and further can be made lightweight by an effect of a foam molding body. <P>SOLUTION: There is provided the cassette for substrate for separating and supporting glass substrates without mutual contacting with each other, the cassette for substrate being characterized in that a part of a component constituting the cassette for substrate is made of a foam molding body of polyarylene sulfide resin. <P>COPYRIGHT: (C)2013,JPO&INPIT |
