发明名称 PACKAGE, MANUFACTURING METHOD THEREOF, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE AND RADIO-CONTROLLED TIMEPIECE
摘要 PROBLEM TO BE SOLVED: To provide a package which is superior in airtightness because the corrosion of a bonding material is suppressed, a manufacturing method of the package, a piezoelectric vibrator, an oscillator, an electronic device, and a radio-controlled timepiece.SOLUTION: A package 10 comprises: a base substrate 2; a lid substrate 3; an Al-containing bonding material 23 which is formed on a surface 2b of the base substrate, and through which the base substrate 2 is anodically bonded to a frame edge region 3c of the lid substrate 3; and a first protection film 11a and a second protection film 11b which are formed on an external surface of the package 10 so as to cover the bonding material 23 exposed from between the base substrate 2 and the lid substrate 3. One of the protection films is made of Si, and the other is made of niobium oxide.
申请公布号 JP2013131856(A) 申请公布日期 2013.07.04
申请号 JP20110278854 申请日期 2011.12.20
申请人 SEIKO INSTRUMENTS INC 发明人 KOBAYASHI TAKASHI
分类号 H03H3/02;H01L23/00;H01L23/02;H03B5/32;H03H9/02 主分类号 H03H3/02
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