发明名称 |
Transverse acoustic wave resonator, oscillator having the resonator and method for making the resonator |
摘要 |
A transverse acoustic wave resonator includes a base, a resonator component, a number of driving electrodes fixed to the base and a number of fixing portions connecting the base and the resonator component. The resonator component is suspended above a top surface of the base and is perpendicular to the base. The driving electrodes are coupling to side surfaces of the resonator component. The resonator component is formed in a shape of an essential regular polygon. The driving electrodes and the resonator component jointly form an electromechanical coupling system for converting capacitance into electrostatic force. Besides, a capacitive-type transverse extension acoustic wave silicon oscillator includes the transverse acoustic wave resonator and a method of fabricating the transverse acoustic wave resonator are also disclosed.
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申请公布号 |
US8482357(B2) |
申请公布日期 |
2013.07.09 |
申请号 |
US201113310687 |
申请日期 |
2011.12.02 |
申请人 |
XIAO BIN;LV PING;HU WEI;MEI JIA-XIN;LI GANG;MEMSENSING MICROSYSTEMS TECHNOLOGY CO., LTD |
发明人 |
XIAO BIN;LV PING;HU WEI;MEI JIA-XIN;LI GANG |
分类号 |
H03B5/18 |
主分类号 |
H03B5/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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