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发明名称
晶圆贴膜设备及其拉膜裁切机构
摘要
本创作系关于一种晶圆贴膜设备及其拉膜裁切机构,用于一黏膜,此拉膜裁切机构包括一吸附区及一移动刀具,吸附区包含一固定吸附区及对应固定吸附区一侧往复移动的一移动吸附区;移动刀具对应吸附区配置;其中,黏膜被吸附在吸附区时,移动吸附区会朝远离固定吸附区的方向移动,移动刀具能够切割并分离黏膜,从而令分离的所述黏膜吸附在吸附区。藉此,移动吸附区会朝远离固定吸附区的方向移动,以给予黏膜一拉力,使黏膜平整,而便利后续晶圆黏贴于黏膜,让晶圆之制程或检测更佳稳定。
申请公布号
TWM457288
申请公布日期
2013.07.11
申请号
TW102202432
申请日期
2013.02.05
申请人
世錡科技有限公司 桃园县中坜市永福路610号
发明人
廖鸿有;许志禧;李维堂
分类号
H01L21/67
主分类号
H01L21/67
代理机构
代理人
谢佩玲 台北市大安区罗斯福路2段107号12楼;王耀华 台北市大安区罗斯福路2段107号12楼
主权项
地址
桃园县中坜市永福路610号
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