| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical system with a wide-angle reflection coaxial illumination securing a wide illumination area without sacrifice of WD (Working Distance) in the optical system with the coaxial illumination formed by combining an image capture optical system of an area sensor camera with a surface light source coaxial illumination device.SOLUTION: The wide-angle reflection optical system with coaxial illumination includes: an image capture optical system for forming an image of an inspection object on an area sensor camera; a branch optical element disposed rearward a lens that is closest to the inspection object side of the image capture optical system, and located on an optical axis; and a surface light source coaxial illumination light source causing an illumination luminous flux to enter the branch optical element from a direction of crossing with the optical axis of the image capture optical system. |
