THREE DIMENSIONAL SURFACE MEASURING DEVICE AND METHOD USING SPECTROMETER

摘要

PURPOSE: A three-dimensional surface measurement device capable of using the spectroscope and a method thereof are provided to enable the magnification change to the telecentric lens in the front end of a detector, thereby enabling various resolutions variation and the measurement. CONSTITUTION: A three-dimensional surface measurement device capable of using the spectroscope (236) is comprised of a first light splitter (218), an interference light path changing unit (230), an optical element delivery unit (232) and a detection unit (240). The first light splitter separates the white light from the light source (210) into to the reference light and the measurement light, and irradiates to a reference mirror (222) and a sample (226). The first light splitter interferes in the light which is reflected from the reference mirror and the sample and generates the interference light. The interference light path changing unit changes the path of the interference light which is emitted from the first light splitter. The optical element delivery unit linearly moves the interference light path changing unit. The detection unit consecutively irradiates the section of the interference light which changed the path by the linearly moving interference light path changing unit. The detection unit obtains the spectroscopic image of each section of the interference light. [Reference numerals] (210) Light source; (214) Collimation unit; (232) Optical element delivery unit; (AA) Reference surface