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发明名称
MULTILAYER WIRING TYPE SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS556871(A)
申请公布日期
1980.01.18
申请号
JP19780079539
申请日期
1978.06.29
申请人
NIPPON ELECTRIC CO
发明人
NAKAMURA MASARU
分类号
H01L21/60;H01L21/768;H01L23/522
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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