| 发明名称 |
METHOD OF FORMATION OF COHERENT WAVY NANOSTRUCTURES (VARIANTS) |
| 摘要 |
The method for forming wavelike coherent nanostructures by irradiating a surface of a material by a homogeneous flow of ions is disclosed. The rate of coherency is increased by applying preliminary preprocessing steps.
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| 申请公布号 |
US2013228780(A1) |
申请公布日期 |
2013.09.05 |
| 申请号 |
US201313859442 |
申请日期 |
2013.04.09 |
| 申请人 |
WOSTEC, INC. |
发明人 |
SMIRNOV VALERY K.;KIBALOV DMITRY S. |
| 分类号 |
B82B3/00;H01L29/06;H01L;H01L21/306 |
主分类号 |
B82B3/00 |
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