| 摘要 |
A two-dimensional X-ray shield grating which may be manufactured more easily and to a manufacturing method to provide therefor is provided. The method of manufacturing the X-ray shield grating includes: a first step of forming a plurality of columnar structures periodically arranged in two directions; and a second step of forming a film which surrounds at least side surfaces of the respective plurality of columnar structures, in which, in the second step, portions of the film formed on side surfaces of columnar structures which are adjacent to each other in the two directions among the plurality of columnar structures are connected to each other in the two directions, and in which the film is formed so that a columnar aperture is formed between columnar structures which are diagonally adjacent to each other with respect to the two directions among the plurality of columnar structures.
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