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发明名称
DIVIDING TABLE
摘要
申请公布号
JPS5553428(A)
申请公布日期
1980.04.18
申请号
JP19780126243
申请日期
1978.10.16
申请人
HITACHI LTD
发明人
ARAI SHIGERU
分类号
H01L21/673;H01L21/52;H01L21/58;H01L21/67
主分类号
H01L21/673
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代理人
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地址
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