| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device having a small occupied area and a resistor.SOLUTION: A column contact hole reaching to a metal wiring layer, is formed in an insulation film on the metal wiring layer, and a cylindrical resistor is formed on a side surface of the column contact hole. An internal cylindrical resistor is long in a depth direction, and can be formed on a circumference with uniform thickness, thereby a vertical resistor has few resistance change with respect to a temperature change and a small occupied area by thinly forming the resistor. |
