发明名称 METHOD FOR PRODUCING METAL FINE PARTICLE
摘要 PROBLEM TO BE SOLVED: To provide a low cost method for producing metal fine particles, in which a simple apparatus can be used for the production and metal fine particles of metal that cannot be obtained as a metal simple substance can be produced.SOLUTION: A reaction solution S containing an organic solvent and an organometallic salt is accommodated in a reaction vessel 1. A pulse voltage is applied between a pair of electrodes 2 immersed in the reaction solution to evaporate the reaction solution, and a plasma P is generated in bubbles generated at that time. The organometallic salt is decomposed by active species in the plasma to deposit metal fine particles, and the deposited metal fine particles are collected.
申请公布号 JP2013185171(A) 申请公布日期 2013.09.19
申请号 JP20120049292 申请日期 2012.03.06
申请人 ULVAC JAPAN LTD 发明人 TAKEI HIDEO;SAKIO SUSUMU;SATO MUNEYUKI;HIRAOKA KENSUKE;IKEDA SATOSHI;OTAKE FUMITO;SAKAO YOSUKE
分类号 B22F9/14;B22F9/30 主分类号 B22F9/14
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