| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology capable of suppressing a decrease in operating efficiency of a coating and developing apparatus, and preventing complication of an operation of substrate transport means, when abnormalities occur in a hydrophobic treatment module or a unit block for forming a coating film, or when performing maintenance.SOLUTION: A coating and developing apparatus is configured to comprise: an N-multiplexed unit block for coating on which the same coating film is formed respectively; and a hydrophobing module of N groups which performs hydrophobic treatment on a substrate before forming a coating film, and a delivery mechanism which is controlled to deliver the substrate from the hydrophobing module of the N groups to a corresponding unit block for coating, respectively, in a lifting and transporting block between a carrier block and a processing block. |
