| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology capable of accurately positioning between a substrate and a carrier even when it is difficult to secure a favourable photographing environment in the technology of transferring a transferred material carried on a carrier to a substrate.SOLUTION: The data B from which the effect of the random noise is removed is obtained by filter processing to remove a frequency component higher than a spatial frequency corresponding to the line width of a pattern with respect to image data (A) formed by imaging an alignment pattern AP2. Further, data (C) formed by extracting only a component (mainly a shading component) which is lower than the spatial frequency corresponding to the line width of the pattern is obtained. The shading component is removed by comparing the data of (B) and the data of (C), and furthermore, data (D) in which the edge portion of the alignment pattern AP2 is emphasized is obtained by multiplying an emphasis coefficient larger than 1. |
