YOUNG'S MODULUS MEASURING METHOD OF ABRASIVE GRAIN OF CHEMICAL MECHANICAL POLISHING SLURRY

摘要

PROBLEM TO BE SOLVED: To provide a method for quickly measuring a Young's modulus of an abrasive grain of chemical mechanical polishing slurry.SOLUTION: A Young's modulus measuring method of an abrasive grain of chemical mechanical polishing slurry comprises the steps of: fixing a plurality of abrasive grains powders to a sample stand by adhesive agents; setting the sample stand to a scanner of an atomic force microscope comprising a cantilever having a predetermined spring constant and a probe; setting a plurality of probe positions with respect to the probe; repeating contact and release of the probe with and from respective abrasive grains so as to correspond to the plurality of probe positions set; generating a force curve measured by the atomic force microscope by the contact and the release of the probe; converting a vertical axis to force and a horizontal axis to a deformation depth and graphing a positional relation between the force and the probe by using a Young's modulus calculation software; and obtaining a Young's modulus of each abrasive grain from the positional relation between the force and the probe.