LASER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

摘要

PROBLEM TO BE SOLVED: To efficiently amplify a laser beam.SOLUTION: A laser device may comprise: a master oscillator which outputs a pulse laser beam; at least one amplifier disposed on an optical path of the pulse laser beam; at least one first optical isolator which uses a GaAs crystal disposed on the optical path of the pulse laser beam as an electro-optic crystal; at least one second optical isolator which uses a CdTe crystal disposed on the optical path of the pulse laser beam as the electro-optic crystal; and a controller connected to the master oscillator, the first optical isolator, and the second optical isolator.