| 摘要 |
PROBLEM TO BE SOLVED: To solve such problems that, in an apparatus and a method for forming a film using powder as a film forming material, it is impossible to stably feed the powder by a minute amount if the powder is agglomerated, furthermore, the quality of a film is degraded if the powder enters the film forming apparatus while the powder is agglomerated.SOLUTION: In a film forming apparatus, a pair of electrodes are disposed in a closed container while facing each other to cause an electrical discharge and configured to place powder as a film forming material on one of the paired electrodes. A film forming method includes the steps of: causing an electrical discharge while the powder is held between the pair of electrodes; disintegrating the agglomerated powder and simultaneously allowing the powder to fly up in the air; and supplying the powder to the film forming apparatus by allowing the powder to flow in the current of a gas. |
