发明名称 ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an electronic device capable of sufficiently suppressing the influence of parasitic components.SOLUTION: An electronic device includes: a semiconductor substrate 10; a driving circuit 21 provided on the semiconductor substrate; an insulating region 30 provided on the semiconductor substrate, having a first insulating portion 31 formed by a plurality of interlayer insulating films and a second insulating portion 32 provided on the first insulating portion, and covering the driving circuit; an element 40 for high frequency provided on the insulating region and driven by the driving circuit; wiring 50 including a first conductor portion 51 provided in the first insulating portion and a second conductor portion 52 provided in the second insulating portion, and transmitting a driving signal from the driving circuit to the element 40; a first shield 61 provided in the insulating region under the element 40; and a second shield 62 provided in the insulating region under the second conductor portion 52.
申请公布号 JP2013232535(A) 申请公布日期 2013.11.14
申请号 JP20120103925 申请日期 2012.04.27
申请人 TOSHIBA CORP 发明人 YAMAZAKI HIROAKI
分类号 H01L21/3205;B81B7/02;H01G5/18;H01L21/768;H01L21/822;H01L23/522;H01L27/04;H03H9/24 主分类号 H01L21/3205
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