发明名称 |
EVALUATING TRANSISTORS WITH E-BEAM INSPECTION |
摘要 |
A test structure of a semiconductor wafer includes a series of electrical units connected electrically in series output-to-input in an open loop configuration. The series of electrical units is configured to have alternating output voltages, such that each electrical unit is configured to output a voltage opposite an output voltage of a preceding electrical unit. Each electrical unit is configured to have an output voltage that alternates when an input voltage applied to a first electrical unit in the series of electrical units alternates.
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申请公布号 |
US2013300451(A1) |
申请公布日期 |
2013.11.14 |
申请号 |
US201213470645 |
申请日期 |
2012.05.14 |
申请人 |
PATTERSON OLIVER D.;SONG ZHIGANG;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
PATTERSON OLIVER D.;SONG ZHIGANG |
分类号 |
G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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