发明名称 Substrate carrier having drip edge configurations
摘要 Substrate carrier can have drainage area leading the liquid away from the substrates, so that liquid droplet can be channeled away from the substrate area. The drainage area can include tilted lines and surfaces toward the ground away from the substrates. The carrier can further have drainage area leading the liquid to an end of the carrier, which then can be channeled to the ground without being free fall to the ground.
申请公布号 US2013302994(A1) 申请公布日期 2013.11.14
申请号 US201313863354 申请日期 2013.04.15
申请人 DYNAMIC MICRO SYSTEMS 发明人 REBSTOCK LUTZ
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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