VIBRATION PIECE, ELECTRONIC DEVICE, ELECTRONIC APPARATUS AND MANUFACTURING METHOD FOR VIBRATION PIECE

摘要

PROBLEM TO BE SOLVED: To provide a vibration piece that causes a manufacturing process to be simplified by etching of an outer shape and etching of groove portions being simultaneously performed at the time of manufacturing of the vibration piece and allows relative positional accuracy between the groove portions and the outer shape to be improved, and further to provide an electronic device, an electronic apparatus and a manufacturing method for the vibration piece.SOLUTION: A vibration piece 44 comprises a base portion and vibration arms 40 protrusively formed from the base portion and has a plurality of groove portions 42 formed on the vibration arms 40. The plurality of groove portions 42 is disposed such that a plurality of rows in which a plurality of grooves 48 is disposed side by side in a lengthwise direction of the vibration arms 40 is disposed side by side in a width direction of the vibration arms 40. Center positions of the plurality of grooves 48 belonging to the plurality of rows adjacent to one another are shifted from one another in the width direction of the vibration arms 40. In this case, the groove portions 42 are formed by using any one shape of a circle, an ellipse and a polygon or a shape obtained by combining a plurality ones of the circle, the ellipse and the polygon as viewed from a plan view of the vibration arms 40.