| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which enables an arm part of a transfer robot to be moved down to a minimum height position while increasing the lifting range of the arm part of the transfer robot.SOLUTION: A substrate processing apparatus includes: a housing enabling the interior to be cleaned; and a transfer robot which transfers a substrate and is disposed in the housing with a base part embedded in a recessed part formed on a bottom wall part of the housing. The base part supports an arm part having a hand capable of holding the substrate so that the arm part moves up and down and rotates in a horizontal direction. |
