| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and an inspection device that can perform an accurate inspection to a specimen having a mesa part with a pattern provided.SOLUTION: The inspection method is configured to: mount the specimen having the mesa part with the pattern provided on a Z table; irradiate the mesa part with light via an optical system and measure a hight of the mesa part by receiving the light reflected at the mesa part; prepare a height map in the mesa part from a height of a peripheral part of the mesa part; correct the height of the mesa part to be obtained from the height map on the basis of a deviation from a target value of a measurement value of the height of the mesa part and a chronological change amount of a focus position of the light with which the mesa part is irradiated; obtain an optical image of the pattern while controlling a position of the Z table on the basis of the corrected height of the mesa part; and compare the optical image with a reference image and when a difference value between the optical image and the reference image exceeds over a predetermined threshold value, determine that the pattern is defect. |
