| 摘要 |
PURPOSE: A magnetic fluid sealing apparatus and a vacuum processing apparatus using the same are provided to reduce the manufacturing cost of equipment by accurately measuring the number of rotations of a rotary shaft or a susceptor. CONSTITUTION: A magnet member (144) forms a nonuniform magnetic field. The magnet member is formed on the rotary shaft passing through a housing. A magnetic fluid (143) is formed between the housing and the rotary shaft. The magnetic fluid seals the gap between the housing and the rotary shaft. A sensor part (146) counts the number of rotations of the rotary shaft. [Reference numerals] (146b) Counter part |
