| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a carbonaceous film capable of obtaining a carbonaceous film having high flatness free from creases, distortion and a crack, by carbonizing a polymer film by heat treatment.SOLUTION: A method for producing a carbonaceous film includes: a lamination step for laminating alternately one or more polymer films 13 and heat-resistant films 11 having heat resistance at a temperature equal to or higher than a thermal decomposition temperature of the polymer film 13, to thereby obtain a laminate 10; and a carbonization step for thermally treating the laminate 10 at a temperature equal to or higher than the thermal decomposition temperature of the polymer film 13 in inert gas or in vacuum to carbonize the polymer films 13, and to thereby obtain a carbonaceous film 15. |
