| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical characteristics measuring system and an optical characteristics measuring method that make possible accurate measurement of numerical optical characteristics of a sample regarding which dispersion on a boundary between the surface of a substrate and a generated film is too great to ignore.SOLUTION: An optical characteristics measuring system comprises means for acquiring the refractive index and the extinction coefficient of an unprocessed substrate, means for acquiring the interfacial coefficient of the substrate, means for acquiring the wavelength distribution characteristics of the refractive index or the transmittance on the basis of light reflected or transmitted by the sample, the sample being generated by processing, means for determining a model formula representing optical characteristics of the sample on the basis of the refractive index, the extinction coefficient and the interfacial coefficient of the substrate and determining parameters defining the model formula on the basis of the wavelength distribution characteristics, and means for calculating numerical optical characteristics of the sample from the determined parameters. |
