APPARATUS FOR INSPECTING SUBSTRATE AND TRANSMISSION ILLUMINATOR FOR APPARATUS FOR INSPECTING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a substrate and a transmission illuminator for the apparatus for inspecting a substrate, which can accurately inspect a substrate by preventing an infrared light from an infrared light source from being incident on a camera without transmitting the substrate.SOLUTION: A form and a disposition of an infrared light source 2 are set so that a field of view of the infrared light source 2 by a CCD camera 6 is covered by a field of view of a substrate 1 by the CCD camera 6. By the actions of a Fresnel lens 5, an irradiation angle of an infrared light emitted from an LED element disposed in the vicinity of an end edge of the infrared light source 2 is deflected in the end edge direction of the substrate 1. Intensity of an infrared light with which the substrate 1 is irradiated from the infrared light source 2 is set larger in the end edge region of the substrate 1 than in the center of the substrate 1.